FC1500AKMF1500
Closed-Loop Air Flow Controller
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The FC1500AKMF1000 series consist of a proportional flow control valve FC1500 and a MEMS gas flow meter. FC1500 is a highly refined needle valve driven by a micro step stepper motor. Turndown ratio can reach up to 400: 1, with high accuracy, repeatability, and hysteresis. The FC valve is compatible with air, water, and oil. It has a selection of Viton or FFKM O-ring, and body material can be aluminum or stainless steel.
The MEMS gas flow meter features quick response time and high accuracy. It is compatible and calibrated with air. It has exceptional stable output signal and low power consumption. The combination of flow meter with FC valve provides a outstanding performance on high flow control with high resolution.
All our products have CE, SGS, RoHS certification with ISO13485 quality system.
Features
- Compact
- High Precision
- High Sensitivity
- High Resolution
Industrial application
- Semiconductor equipment
- Cooling Machines
- Dynamic Flow Rate Control
| Type | FC1500AKMF |
|---|---|
| Flow Range (SLPM) | 0-25 / 0-50 / 0-250 / 0-1000 |
| Max. Pressure | 5 bar (72.5 psig) |
| Input Signal | 0-10V / 0-5V / 4-20mA / RS485 |
| Monitor Output | 1-5V / RS485 |
| Supply Power (VDc) | 24 VDc (12W) |
| Medium | Clean compressed air or with 5 µm filter |
| Accuracy | ±1.5% F.S |
| Repeatability | 0.025% |
| Valve Resolution | 0.5 L/min *inlet pressure 1bar (14.5psi) |
| Turndown Ratio | 100:1 |
| Display | SLPM (Instant Flow) / SL (Accum Flow) |
| Temp. | 10~65℃ (Fluid) |
| -25~85 ℃ (Ambient) | |
| Port | G3/8" |
| Manifold Material | Aluminum |
| Wetted Materials | Aluminum, Viton |
| Electrical Connection | EDZ1550/4 |
| Calibration | Air, 20℃, 101.325kPa |