High Resolution Electronic Flow Control Valve
The High Resolution Electronic Flow Control Valve is the next-generation of flow control valves designed to meet the needs of the semiconductor industry. Using a servo motor and optical position sensor, it delivers ultra-high resolution and repeatability with low leakage rates for leak and purge applications. With a single seat design and no differential pressure, the High Resolution Valve provides superior performance over legacy needle valves.
The high resolution electronic flow control valve
The High Resolution Electronic Flow Control Valve is a single-seat design, which means no differential pressure is required to actuate the valve. The servo motor and optical position sensor allow for ultrahigh resolution, repeatability and low leakage rates for leak and purge applications.
The High resolution valve is the next-generation of flow control valves designed to meet the needs of the semiconductor industry.
The High Resolution Valve is the next-generation of flow control valves designed to meet the needs of the semiconductor industry. Using a servo motor and optical position sensor, it delivers ultra-high resolution and repeatability with low leakage rates for leak and purge applications. With a single seat design and no differential pressure, the High Resolution Valve provides superior performance over legacy needle valves.
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The high resolution valve contains numerous patented innovations.
The high resolution valve contains numerous patented innovations that make it unlike anything else in the marketplace today.
In particular, our design provides an unprecedented level of accuracy and control for flow rate, allowing for precise handling of small fluid volumes, such as those found in lab medicine or microfluidics applications. This allows users to control the delivery of their samples with greater accuracy than ever before.
Flow rates are controlled by a mechanical lever arm which slides back-and-forth along a thin tube within the body of our device. As pressure increases inside this tube (i.e., as more liquid passes through), this arm will rotate slightly to its full extent (a distance equal to approximately 0.5 degrees). When rotated fully, it triggers either full open or close mode depending on which side is pushed against another pin coming out from its bracket - one side controls fluid going into your system while another controls liquid leaving it!
Flows up to 65 slpm
In addition to flow rates of up to 65 slpm, the valve offers industry-leading resolution of 0.05% of full scale and repeatability to 0.05%.
Using a single-seat design, no differential pressure is required – eliminating the need for hydraulic power or external energy sources such as compressed air or electricity.
Industry-leading resolution of 0.05% of full scale
The resolution of the valve is 0.05% of full scale. That is better than other valves, as well as our competitors' electronic flow control valves. It's also better than the resolution of any of our competitor’s products in this category.
Repeatability to 0.05%
High resolution means that we can achieve repeatability to 0.05% of full scale. Repeatability is a term used in electronics and instrumentation to refer to the ability of a device to produce identical results when given the same input over time. The higher the resolution, the more precise your output will be.
Our valves are capable of 0.05% of full scale repeatability, which is extremely high for a flow control valve and an industry standard that’s used worldwide for precision measurement equipment such as pressure transmitters and level sensors.
Single-seat design, no differential pressure required
The single-seat design of the EFCV means that it requires no differential pressure, which is great news for your system. Differential pressure is a common issue with electronic flow controls. It occurs when the temperature of fluid passing through a valve changes due to its location or proximity to other equipment in your system. This can cause additional stress on your components and even lead to damage over time if left unchecked. The EFCV has been engineered so that it will not experience this problem, even under extreme conditions—which means less maintenance for you!
The high resolution electronic flow control valve offers ultra-high resolution with low leakage rates for semiconductor applications.
The High Resolution Electronic Flow Control Valve offers ultra-high resolution with low leakage rates for semiconductor applications. It has a high precision, high resolution, low leakage rate and ultra-high repeatability.
This electronic valve overcomes the drawbacks of the prior art and has a high precision, high resolution, low leakage rate, and has ultra-high repeatability.
The electronic flow control valve of this invention can be operated by a computer, and is generally used as a high resolution valve to control the flow rate and direction of liquid or gas. This electronic valve overcomes the drawbacks of the prior art and has a high precision, high resolution, low leakage rate, and has ultra-high repeatability. The electronic flow control valve comprises:
A housing having an inlet port and an outlet port;
A sleeve arranged between the inlet port and outlet port;
A sensing element arranged on the sleeve; 4) An actuator arranged at one end of the sleeve; 5) An electric motor arranged inside said housing with respect to said actuator so that it can be rotated by an electric current passing through said electric motor while its rotation axis intersects with that of said actuator; 6) A cam device including multiple cams arranged respectively on opposite ends (left end and right end) of said electric motor so that each cam rotates along with rotation of its corresponding electric motor when pressed against by another member such as spring or spring washer which is fixedly mounted on top surface portion thereof until reaching its bottom dead point position where it stops rotating due to its own inertia torque after being released from pressing force applied thereto thereby allowing said other member (spring or spring washer) to move upwards along with rise/falling movement thereof so as not only maintain same distance between each pair among them but also prevent any relative movement therebetween during operation cycle without causing any load burden on aforementioned cam device itself due
The High Resolution Electronic Flow Control Valve is a great replacement for the mechanical and pneumatic valves that are used today. It has a high precision, high resolution, low leakage rate and ultra-high repeatability. The valve is ideal for semiconductor applications because it can handle flows up to 65 slpm while providing industry-leading resolution of 0.05% full scale
** For Command Signal type 0-10V, the minimum driving current is 3mA
- The indicated flow rate is air, please consult for liquid flow rate
- Please contact us for customized flow range
★ FC and PM series are calibrated in pair. Before operating, please ensure the serial numbers on FC and PM are in pair in order to prevent potential leakage issue.
- Before piping is connected, it should be thoroughly blown out with air (flushing) or washed to remove chips, cutting oil and other debris from inside the pipe.
- When screwing together pipes and fittings, etc., be certain that chips from the pipe threads and sealing material do not get inside the piping. When sealant tape is used, leave 1.5 to 2 thread ridges exposed at the end of the threads.
- Do not operate in locations having an atmosphere of corrosive gases, chemicals, sea water, or where there will be contact with the same.
- Ensure the fluid passing through the valve does not contain solid particles. Please use a filter before the inlet port.
- In locations which receive direct sunlight, provide a protective cover etc.
- KaoLu’s product cannot be used as an emergency shutoff. A redundant safety system should be installed in the system to prevent serious injury or loss of life.
KaoLu Ent. Co. Ltd. products are warranted to the original purchaser only against defects in material or workmanship for 6 months from the date of manufacture. The extent of KaoLu’s liability under this warranty is limited to repair or replacement of the defective unit at KaoLu’s option. KaoLu shall have no liability under this warranty where improper installation or filtration occurred.